*1 Model | ESR 20N | ESR 30 | ESR 30N | ESR 80W | ESR 80WN | ESR 100WN | ESR 200W | ESR 200WN | ESR 300W(N) | ESR 500W(N) | ||||
Pumping Speed | L/min | 1,300~ 2,000 | 3,000 | 4,000~ 8,500 | 4,000~ 10,000 | 10,000~ 20,000 | 30,000 | 46,000 | ||||||
Ultimate Pressure*2 | Pa | 2.0 | 0.53 | 0.67 | 0.5 | 0.2 | 0.2 | 0.5 | 0.13 | 0.2 | 0.2 | |||
Connection | Gas Inlet | NW40 | NW50 | NW100 | ISO160 | |||||||||
Gas Outlet | NW40 | |||||||||||||
Approx.Power at Ultimate Pressure | kW | 0.7 | 1.7 | 1.0 | 1.1 | 2.9 | 3.1 | |||||||
Utility | Cooling Water | Flow rate | L/min | 2~8 | 3.5~8 | 2~5 | 2~8 | 2~5 | 2~8 | 3.5~8 | ||||
Temperature | ℃ | Max. 30 | ||||||||||||
N2 Gas | Approx. Flow rate (N2-0 Mode) | Pa•m3/s | 19~22 (0) | 19~22 (3.4) | 17~21 (4) | 19~22 (3.4) | 17~21 (4) | 19~22 (3.4) | ||||||
Power Supply | Phase/ Volt/ Freq. | 200V Model | 3Phase/200V/50Hz 3Phase/200-220V/60Hz | |||||||||||
400V Model | 3Phase/380-400V/50Hz 3Phase/380-440V/60Hz | |||||||||||||
Power capacity | kV | 40 | 7.0 | 8.0 | 10.6 | 12.3 | ||||||||
Weight | kg | 90 | 190 | 170 | 180 | 210 | 250 | 390 | 500 |